Separation of sulfur hexafluoride (SF6) from ternary gas mixtures using commercial polysulfone (PSf) hollow fiber membranes

Author:

Lee Soonjae,Lee Jong SukORCID,Lee Minwoo,Choi Jae-Woo,Kim Sunghyun,Lee Sanghyup

Publisher

Elsevier BV

Subject

Filtration and Separation,Physical and Theoretical Chemistry,General Materials Science,Biochemistry

Reference27 articles.

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3. A review of uses, environmental hazards and recovery/recycle technologies of perfluorocarbons (PFCs) emissions from the semiconductor manufacturing processes;Tsai;J. Loss Prev. Process Ind.,2002

4. UNFCCC, Project 3333: Samsung Electronics SF6 abatement project, in: Proceedings of Clean Development Mechanism Project, 2011.

5. Membranes for gas separation;Freemantle;Chem. Eng. News,2005

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