Experimental investigation and techno-economic analysis of tetramethylammonium hydroxide removal from wastewater in nano-electronics manufacturing via membrane distillation-Reference-Cited by-同舟云学术

Experimental investigation and techno-economic analysis of tetramethylammonium hydroxide removal from wastewater in nano-electronics manufacturing via membrane distillation

Published:2019-06 Issue: Volume:579 Page:283-293
ISSN:0376-7388
Container-title:Journal of Membrane Science
language:en
Short-container-title:Journal of Membrane Science

Author:

Noor Imtisal-e-,Coenen Jan,Martin Andrew,Dahl Olli,Åslin Miriam

Funder

KTH Royal Institute of Technology, Sweden

Aalto University, Finland

EACEA

KTH

Interuniversity MicroElectronics Center

Publisher

Elsevier BV

Subject

Filtration and Separation,Physical and Theoretical Chemistry,General Materials Science,Biochemistry

Reference43 articles.

1. Urban Waste Water Treatment;Council Directive 91/271/EEC,1991

2. Handbook of Semiconductor Manufacturing Technology;Nishi,2000

3. Elevated pressure CO2-based fluids containing polar Co-solvents for cleaning in microelectronic device fabrication;Levitin,2007

4. Oxidative degradation of TMAH solution with UV persulfate activation;Wang;Chem. Eng. J.,2014

5. National Center for Biotechnology Information, “Tetramethylammonium hydroxide,” PubChem Compound Database; CID=60966, [Online]. Available: https://pubchem.ncbi.nlm.nih.gov/compound/60966. [Accessed: 30 April 2018].

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