Mechanical properties of amorphous boron carbon nitride films produced by dual gun sputtering
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials
Cited by 28 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
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3. Defects-induced transition in low-temperature electrical properties of boron carbon nitride thin films;Journal of Materials Science: Materials in Electronics;2022-01-28
4. Defect states induced luminescence and electrochemical studies of boron carbon nitride nanosheets;Applied Surface Science;2021-09
5. Structural and Mechanical Properties of a-BCN Films Prepared by an Arc-Sputtering Hybrid Process;Materials;2021-02-03
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