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Phase measurement accuracy of feedback interferometers

  • Published:2002-12 Issue:6 Volume:38 Page:387-404
  • ISSN:0143-8166
  • Container-title:Optics and Lasers in Engineering
  • language:en
  • Short-container-title:Optics and Lasers in Engineering

Author:

Barnes T.H,Eiju T,Cheung D.C.L,Wu C.Y

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. Heterodyne interferometer for measuring surface profiles;Shagam;J Opt Soc Am,1977

2. Phase measurement interferometry techniques;Creath,1998

3. Phase locked interferometry;Johnson;Opt Eng,1979

4. Phase locked laser diode interferometry for surface profile measurement;Suzuki;Appl Opt,1989

5. Direct, unambiguous display of phase-difference using optical feedback to a phase-only spatial light modulator;Barnes;Optick,1995
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