Underwater and water-assisted laser processing: Part 2—Etching, cutting and rarely used methods

Author:

Kruusing Arvi

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference124 articles.

1. Kruusing A. Underwater and water-assisted laser processing. Part 1. General features, steam cleaning and shock processing. (This issue: PII: S0143-8166(02)00142-2).

2. Etching of sapphire assisted by copper-vapor laser radiation;Dolgaev;Quantum Electron,1996

3. Fast etching of sapphire by visible range quasi-cw laser radiation;Dolgaev;Appl Surf Sci,1996

4. Micromachining by laser ablation of liquid;Wang;Proc SPIE,2000

5. Increase of efficiency for the XeCl excimer laser ablation of ceramics;Geiger;Appl Surf Sci,1996

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