Analysis of problem in mathematical model for shadowed sputtering
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Published:2000-07
Issue:1-2
Volume:130
Page:47-53
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ISSN:0010-4655
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Container-title:Computer Physics Communications
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language:en
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Short-container-title:Computer Physics Communications
Author:
Sevastianov L.A.,Zhidkov E.P.
Subject
General Physics and Astronomy,Hardware and Architecture