Author:
Miyahara H.,Takai M.,Nishimoto T.,Kondo M.,Matsuda A.
Subject
Surfaces, Coatings and Films,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference5 articles.
1. T. Nishimoto, M. Takai, M. Kondo,A. Matsuda, in: Proceedings of the 28th IEEE Photovoltaic Specialists Conference, Anchorage, Alaska, 2000, pp. 876–879.
2. M. Takai, T. Nishimoto, M. Kondo, and A. Matsuda, Proceedings of the Plasma Science Symposium and the 18th Symposium on Plasma Processing, Kyoto, 2001, pp. 745–748
3. Effect of higher-silane formation on electron temperature in a silane glow-discharge plasma
4. Dissociative excitation of SiH4, SiD4, Si2H6 and GeH4 by 0–100 eV electron impact
5. Cross-Sections, Rate Constants and Transport Coefficients in Silane Plasma Chemistry
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