Indium tin oxide films deposited by thermionic-enhanced DC magnetron sputtering on unheated polyethylene terephthalate polymer substrate
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
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3. Effects of hydrogen and SiO2 buffer layer insertion on electrical properties of low-resistive indium tin oxide films formed on polyethylene naphthalate films;Japanese Journal of Applied Physics;2022-10-01
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