Determination of thickness, density and roughness of Co–Ni–Al single and multiple layer films deposited by high-vacuum e-beam evaporation on different substrates-Reference-Cited by-同舟云学术

Determination of thickness, density and roughness of Co–Ni–Al single and multiple layer films deposited by high-vacuum e-beam evaporation on different substrates

Published:2006-07 Issue:1 Volume:57 Page:12-16
ISSN:1044-5803
Container-title:Materials Characterization
language:en
Short-container-title:Materials Characterization

Author:

Baake O.,Öksüzoglu R.M.,Flege S.,Hoffmann P.S.,Gottschalk S.,Fuess H.,Ortner H.M.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

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4. X-ray reflectivity and spectroscopic ellipsometry as metrology tools for the characterization of interfacial layers in high-κ materials;Ferrari;Thin Solid Films,2004

5. In-line monitoring of advanced microelectronics processes using combined X-ray techniques;Wyon;Thin Solid Films,2004

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