Microstructural evolution and electrical resistivity of nanocrystalline W thin films grown by sputtering
Author:
Funder
National Research Foundation of Korea
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference32 articles.
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5. Phase transformation of thin sputter-deposited tungsten films at room temperature;Rossnagel;J. Vac. Sci. Technol. B,2002
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