Comparison of plasma-enhanced kinetics between floating and grounded states-Reference-Cited by-同舟云学术

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Comparison of plasma-enhanced kinetics between floating and grounded states

Published:2020-05 Issue: Volume:163 Page:110235
ISSN:1044-5803
Container-title:Materials Characterization
language:en
Short-container-title:Materials Characterization

Author:

Park Soon-won,Ahn Yong-keun,Jeong Yong-kwon,Na Tae-wook,Hwang Nong-moon

Funder

Global Frontier Hybrid Interface Materials

National Research Foundation of Korea

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference31 articles.

1. Measurements of particle size kinetics from nanometer to micrometer scale in a low-pressure argon-silane radio-frequency discharge;Boufendi;Appl. Phys. Lett.,1992

2. Clusters in a silane glow discharge: mechanism of their formation and how to avoid them;Vepřek;MRS Online Proceedings Library Archive,1993

3. Production and destruction of CF x radicals in radio-frequency fluorocarbon plasmas;Haverlag;J. Vac. Sci. Technol. A,1996

4. Overview of growth and behaviour of clusters and particles in plasmas;Garscadden;Plasma Sources Sci. Technol.,1994

5. Chemical potential of carbon in the low pressure synthesis of diamond;Hwang;J. Cryst. Growth,1996

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