Author:
Thangadurai P.,Lumelsky Yulia,Silverstein Michael S.,Kaplan Wayne D.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference38 articles.
1. Low-voltage, high-resolution scanning electron microscopy: a new characterization technique for polymer morphology;Vezie;Polymer,1995
2. The lithographic process: the physics, in introduction to microlithography;Bowden,1994
3. Exposure optimization in high-resolution e-beam lithography;Hudek;Microelectron Eng,2006
4. Recent trends and physical background in the development and application of ion beam techniques for TEM sample preparation;Barna,1990
5. A cross-sectional TEM sample preparation method for films deposited on metallic substrates;Liu;Mater Charact,2007
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