Structural characterizations of magnetron sputtered nanocrystalline TiN thin films

Author:

Chawla Vipin,Jayaganthan R.,Chandra Ramesh

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference19 articles.

1. Nanohardness of nanocrystalline TiN thin films;Ma;Surf Coat Technol,2006

2. Three dimensional imaging of deformation modes in TiN-based thin film coatings;Ma;Thin Solid Films,2007

3. The effect of substrate temperature and biasing on the mechanical properties and structure of sputtered titanium nitride thin films;Patsalas;Surf Coat Technol,2000

4. High rate thick film growth;Thornton;Annu Rev Mater Sci,1977

5. Study of the structure and properties of thick vacuum condensates of nickel, titanium, tungsten, aluminium oxide and zirconium dioxide;Movchan;Phys Met Metallogr,1969

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