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Aluminum based high temperature thin film electrode system for wireless sensors

  • Published:2023-09 Issue: Volume:26 Page:1955-1961
  • ISSN:2238-7854
  • Container-title:Journal of Materials Research and Technology
  • language:en
  • Short-container-title:Journal of Materials Research and Technology

Author:

Seifert MariettaORCID,Leszczynska Barbara,Menzel Siegfried B.,Schmidt Hagen,Gemming Thomas

Funder

Deutsche Forschungsgemeinschaft

Leibniz-Gemeinschaft

Bundesministerium für Wirtschaft und Energie

Publisher

Elsevier BV

Subject

Metals and Alloys,Surfaces, Coatings and Films,Biomaterials,Ceramics and Composites

Reference27 articles.

1. Current trends on surface acoustic wave biosensors;Zida;Advan Mater Technol,2021

2. Wireless multifunctional surface acoustic wave sensor for magnetic field and temperature monitoring;Yang;Advan Mater Technol,2022

3. Advanced 3d printing-based triboelectric nanogenerator for mechanical energy harvesting and self-powered sensing;Chen;Mater Today,2021

4. High temperature stability of electrically conductive Pt–Rh/ZrO2 and Pt–Rh/HfO2 nanocomposite thin film electrodes;Moulzolf;Microsyst Technol,2014

5. Improvement of high-temperature stability of Al2O3/Pt/ZnO/Al2O3 film electrode for saw devices by using Al2O3 barrier layer;Liu;Materials,2017

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