Effect of organic vehicle addition on service lifetime of Ti/IrO2–RuO2 electrodes-Reference-Cited by-同舟云学术

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Effect of organic vehicle addition on service lifetime of Ti/IrO2–RuO2 electrodes

Published:2002-08 Issue:4 Volume:55 Page:211-216
ISSN:0167-577X
Container-title:Materials Letters
language:en
Short-container-title:Materials Letters

Author:

Chae Kyung-Sun,Choi Hyeong-Ki,Ahn Joon-Hong,Song Yo-Seung,Lee Deuk Yong

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference13 articles.

1. Conducting Transition Metal Oxides: Possibilities for RuO2 in VLSI Metallization

2. Characterization of reactively sputtered ruthenium dioxide for very large scale integrated metallization

3. Chemical Vapor Deposition of Ruthenium and Ruthenium Dioxide Films

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