Electrical properties and annealing effects on the stress of RF-sputtered c-BN films
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference21 articles.
1. Study on stress and strain of cubic boron nitride thin films
2. The Effects of Substrate Bias and Si Doping on the Properties of Rf Sputtered Bn Films
3. Electrical properties of boron nitride thin films grown by neutralized nitrogen ion assisted vapor deposition
4. Electrical properties and thermal stability of ion beam deposited BN thin films
5. The effects of substrate bias voltage and radio-frequency power on the growth of c-BN phase coatings
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