Copper damascene electrodeposition and additives
Author:
Publisher
Elsevier BV
Subject
Electrochemistry,General Chemical Engineering,Analytical Chemistry
Reference13 articles.
1. Adsorption Behavior of Polyoxyethyleneglycole on the Copper Surface in an Acid Copper Sulfate Bath
2. Copper Deposition in the Presence of Polyethylene Glycol: I. Quartz Crystal Microbalance Study
3. Copper Deposition in the Presence of Polyethylene Glycol: II. Electrochemical Impedance Spectroscopy
4. Leveling and Microstructural Effects of Additives for Copper Electrodeposition
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