Neutralization of static electricity by soft X-rays and vacuum UV radiation-Reference-Cited by-同舟云学术

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Neutralization of static electricity by soft X-rays and vacuum UV radiation

Published:1994-06 Issue:1 Volume:33 Page:15-42
ISSN:0304-3886
Container-title:Journal of Electrostatics
language:en
Short-container-title:Journal of Electrostatics

Author:

Inaba H.,Ohmi T.,Yoshida T.,Okada T.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Biotechnology,Electronic, Optical and Magnetic Materials

Reference19 articles.

1. Closed manufacturing system for advanced semiconductor manufacturing;Ohmi,1991

2. Growth of native oxide on a silicon surface;Morita;J. Appl. Phys.,1990

3. Water transportation through a tunnel filled with nitrogen gas;Toda,1992

4. IC auto-manufacturing system and neutralization of wafer charging in wafer transportation system;Inaba;J. Jpn. Cleaning Assoc.,1992

5. Research on adhesion of particles to charged wafers critical in contamination control;Ohmi;Microcontamination,1989

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