Reactive scattering of halogen molecules from $lang;111$rang; surfaces of silicon and germanium: Comparison with oxygenic species
Author:
Publisher
Elsevier BV
Subject
Physical and Theoretical Chemistry,Catalysis
Cited by 14 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Investigation of etching and deposition processes of Cl2/O2/Ar inductively coupled plasmas on silicon by means of plasma–surface simulations and experiments;Journal of Physics D: Applied Physics;2009-04-15
2. Adsorption and Desorption Processes;Kinetics of Catalytic Reactions;2005
3. Through the labyrinth of surface reaction mechanism: a personal account, 1964–1992;Surface Science;1994-01
4. Oxygen scattering and initial chemisorption probability on Ge(100);Surface Science;1991-08
5. Atomic versus molecular reactivity at the gas-solid interface: The adsorption and reaction of atomic oxygen on the Si(100) surface;Physical Review B;1990-01-15
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