Electron Physics in Device Microfabrication. II Electron Resists, X-Ray Lithography, and Electron Beam Lithography Update-Reference-Cited by-同舟云学术

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Electron Physics in Device Microfabrication. II Electron Resists, X-Ray Lithography, and Electron Beam Lithography Update

Published:1980 Issue: Volume: Page:69-139
ISSN:0065-2539
Container-title:Advances in Electronics and Electron Physics
language:
Short-container-title:

Author:

Thornton P.R.

Publisher

Elsevier

Reference136 articles.

1. N. Aizaki 1979). Proc. Symp. Electron, Ion, Photon Beam Technol., 15th, 1979.

2. X‐ray lithography by synchrotron radiation of INS–ES

3. Total energy distributions of field-emitted electrons at high current density

4. T.W. Bril J.T. Snijder (1979). Proc. Symp. Electron, Ion, Photon Beam Technol., I5th, 1979.

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