Fabrication of precisely controlled silicon wire and cone arrays by electrochemical etching-Reference-Cited by-同舟云学术

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Fabrication of precisely controlled silicon wire and cone arrays by electrochemical etching

Published:2009-12 Issue:29 Volume:63 Page:2567-2569
ISSN:0167-577X
Container-title:Materials Letters
language:en
Short-container-title:Materials Letters

Author:

Seo Hong-Seok,Li Xiaopeng,Um Han-Don,Yoo Bongyoung,Kim Jae-Hyun,Kim Kang-Pil,Cho Yong Woo,Lee Jung-Ho

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference19 articles.

1. Silicon Vertically Integrated Nanowire Field Effect Transistors

2. Well-oriented nanowell array metrics for integrated digital nanobiosensors

3. Electrochemical Nucleation of SiO_x Nanoparticles into the Pore Bottoms of an Anodic Aluminum Oxide

4. Quantum Confinement and Electronic Properties of Silicon Nanowires

5. Enhanced Raman Scattering from Individual Semiconductor Nanocones and Nanowires

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1. Fabrication of silicon sharp nanocones using dry etch with periodic oxygen plasma shrinking and wet etch;Journal of Vacuum Science & Technology B;2024-04-25

2. Fabrication of P(100) silicon macro-pore and pillar array by wet electrochemical etching;Journal of Micromechanics and Microengineering;2022-05-18

3. Length prediction of silicon nanowires (SiNWs) prepared by the MACE method using the ANN-COA-PSO algorithm for high supercapacitor applications;Journal of Physics and Chemistry of Solids;2021-09

4. Sol–gel synthesis of silicon carbide on silicon pyramids: a promising candidate for supercapacitor electrodes;Journal of Materials Science: Materials in Electronics;2021-08-04

5. Fabrication of octagonal and dodecagonal single crystal Si micropyramids via etching without using a pre-patterned mask;Materials Science in Semiconductor Processing;2019-04

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