Smoothing of rough a-Si:H surfaces by ion-assisted deposition and sputter erosion-Reference-Cited by-同舟云学术

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Smoothing of rough a-Si:H surfaces by ion-assisted deposition and sputter erosion

Published:2006-01 Issue:1 Volume:60 Page:15-18
ISSN:0167-577X
Container-title:Materials Letters
language:en
Short-container-title:Materials Letters

Author:

Dalakos G.T.,Plawsky J.L.,Persans P.D.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference13 articles.

1. Morphological instabilities in thin-film growth and etching

2. Fractal Concepts of Surface Growth;Barabasi,1995

3. Surface Roughness Evolution of PECVD Cathodic and Anodic a-Si:H.

4. G.T. Dalakos, PhD thesis, Rensselaer Polytechnic Institute (2004).

5. Introduction to Surface Roughness and Scattering;Bennett,1999

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