Effect of annealing on the composition, structure and mechanical properties of carbon nitride films deposited by middle-frequency magnetron sputtering-Reference-Cited by-同舟云学术

Effect of annealing on the composition, structure and mechanical properties of carbon nitride films deposited by middle-frequency magnetron sputtering

Published:2007-06 Issue:16 Volume:61 Page:3443-3445
ISSN:0167-577X
Container-title:Materials Letters
language:en
Short-container-title:Materials Letters

Author:

Huang Z.H.,Yang B.,Liu C.S.,Guo L.P.,Fan X.J.,Fu D.J.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference16 articles.

1. Prediction of New Low Compressibility Solids

2. Structural properties and electronic structure of low-compressibility materials: β-Si3N4and hypothetical β-C3N4

3. A New Development in Covalently Bonded Carbon Nitride and Related Materials

4. Infrared analysis of deuterated carbon–nitrogen films obtained by dual-ion-beam-assisted-deposition

5. Role of nitrogen in the formation of hard and elasticCNxthin films by reactive magnetron sputtering

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