Efficiency of high energy fluorocarbon molecule bombardment for fast etch rate and its limitation: A molecular dynamics study
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Published:2024-06
Issue:
Volume:365
Page:136491
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ISSN:0167-577X
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Container-title:Materials Letters
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language:en
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Short-container-title:Materials Letters
Author:
Um JunghwanORCID,
Kang KeonwookORCID