Author:
Adams T.M.,Kirkpatrick S.R.,Wang Z.,Siahmakoun A.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference10 articles.
1. “Prototype micro-valve actuator;Busch,1990
2. TiNi (shape memory) films on silicon for MEMS application;Wolf;J. Microelectromech. Syst.,1995
3. A robust co-sputtering fabrication procedure for TiNi shape memory alloys for MEMS;Shih;IEEE J. MEMS.,2001
4. Sputter deposition of NiTi thin film shape memory alloy using a heated target;Ho;Thin Solid Films,2000
5. Thin film shape memory alloy microactuators;Krulevitch;J. Microelectromech. Syst.,1996
Cited by
19 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献