Preparation and characterization of high quality diamond like carbon films on Si microspheres
Author:
Funder
CAEP
National Natural Science Foundation of China
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference14 articles.
1. Optical, structural and bonding properties of diamond-like amorphous carbon films deposited by DC magnetron sputtering
2. Effect of hydrogen flow on the properties of hydrogenated amorphous carbon films fabricated by electron cyclotron resonance plasma enhanced chemical vapor deposition
3. A magnetron sputtering technique to prepare a-C:H films: Effect of substrate bias
4. Fabrication of DLC thin films with improved diamond-like carbon character by the application of external magnetic field
5. RF-superimposed DC and pulsed DC sputtering for deposition of transparent conductive oxides
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