Room temperature growth of zinc oxide films on Si substrates by the RF magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference27 articles.
1. Characterization of ZnO piezoelectric films prepared by rf planar‐magnetron sputtering
2. Structural properties of zinc oxide thin films prepared by r.f. magnetron sputtering
3. Controlled texture of reactively rf‐sputtered ZnO thin films
4. Characterization and optimization of zinc oxide films by r.f. magnetron sputtering
5. Some physical properties of ZnO sputtered films
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4. Tailoring the Surface Functionalities of Radio Frequency Magnetron-Sputtered ZnO Thin Films by Ar/NH3 Gas Mixture Surface-Wave Plasmas;Langmuir;2018-08-29
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