The crystalline properties of nitrogen doped hydrogenated microcrystalline silicon thin films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. Nucleation of Microcrystallites in Phosphorus-Doped Si:H Films
2. Dependence of electrical conductivity of nanocrystalline silicon on structural properties and the effect of substrate bias
3. Microcrystalline Si: H Film and Its Application to Solar Cells
4. High-Mobility Amorphous-Silicon MUS Transistors
5. Characterization of plasma-deposited microcrystalline silicon
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2. Amorphous, nanocrystalline and crystalline calcium carbonates in biological materials;Journal of Raman Spectroscopy;2010-11-23
3. Effect of small nitrogen dilution on the microstructure of hydrogenated silicon thin films deposited by magnetron radiofrequency sputtering;Thin Solid Films;2004-06
4. Properties of thin film silicon nitride deposited by hot wire chemical vapor deposition using silane, ammonia, and hydrogen gas mixtures;Journal of Applied Physics;2003-08-15
5. Structural evolution in Ar[sup +] implanted Si-rich silicon oxide;Journal of Applied Physics;2003
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