Structural and electrical characterisations of rapid thermal annealed thin silicon oxide films on silicon
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. Exploratory Observations of Effect of Rapid Thermal Processing on Silicon Minority Carrier Lifetime Using Laser Microwave Photoconductance Method
2. Effect of rapid thermal annealing on the structural and electrical properties of a silicon‐silicon oxide system
3. A study of silicon oxides prepared by oxygen implantation into silicon
4. Structural characterization of pure and vanadium doped films of r.f. sputtered SiO2
5. The Current Understanding of Charges in the Thermally Oxidized Silicon Structure
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