Metal–organic chemical vapour deposition of thin films of cobalt on different substrates: study of microstructure-Reference-Cited by-同舟云学术

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Metal–organic chemical vapour deposition of thin films of cobalt on different substrates: study of microstructure

Published:2002-06 Issue:1-2 Volume:413 Page:8-15
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Paranjape Mandar A,Mane Anil U,Raychaudhuri A.K,Shalini K,Shivashankar S.A,Chakravarty B.R

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. The Chemistry of Metal CVD;Kodas,1994

2. OMCVD of cobalt and cobalt silicide

3. Cobalt Thin Films Prepared by Chemical Vapor Deposition from Cobalt Acetylacetonates

4. Cobalt thin films prepared by chemical vapor deposition from cobaltous acetate

5. The chemical vapor deposition of cobalt metal from cobalt (II) acetylacetonate

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