Sol–gel derived PNNZT thin films for micromachined piezoelectric force sensors-Reference-Cited by-同舟云学术

Sol–gel derived PNNZT thin films for micromachined piezoelectric force sensors

Published:1997-05 Issue:1-2 Volume:299 Page:88-93
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Lee Chengkuo,Itoh Toshihiro,Suga Tadatomo

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference28 articles.

1. D.L. Polla, C. Ye, P. Schiller, T. Tamagawa, W.P. Robbins, D. Glumac and C.C. Hsueh, Mater. Res. Soc. Symp. Proc., 243 (1992) 55.

2. K.R. Udayakumar, J. Chen, A.M. Flynn, S.F. Bart, L.S. Tavrow, D.J. Ehrlich, L.E. Cross and R.A. Brooks, Ferroelectrics, 160 (1994) 347.

3. P. Luginbuhl, G.A. Racine, Ph. Lerch, B. Romanowicz, K.G. Brooks, N.F. de Rooij, Ph. Renaud and N. Setter, Technical Digest of Tranducers '95 and Eurosensors IX, Sweden, Jun. 25–29, 1995, p. 413.

4. P. Muralt, M. Kohli, T. Maeder, A. Kholkin, K. Brooks, N. Setter and R. Luthier, Sensors Actuators A, 48 (1995) 157.

5. K. Okazaki, Ceramic Engineering for Dielectrics, Gakken-sha Publishing Co., Ltd. Tokyo, 4th edn., 1992, p. 334, (in Japanese).

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