The effects of deposition rate and substrate temperature of ITO thin films on electrical and optical properties
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. A comparative study of metal-semiconductor-metal photodetectors on GaAs with indium-tin-oxide and Ti/Au electrodes
2. Application of dynamic in situ ellipsometry to the deposition of tin‐doped indium oxide films by reactive direct‐current magnetron sputtering
3. Preparation of indium tin oxide films at room temperature by pulsed laser deposition
4. Radiation damage in indium tin oxide (ITO) layers
5. The origin of the inhomogeneity of electrical resistivity in magnetron-sputtered indium tin oxide thin films
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