Author:
Gadiyak G.V.,Gadiyak V.G.,Kosinova M.L.,Salman E.G.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference15 articles.
1. The mechanism of N-H bond decomposition in silicon nitride films
2. V.I. Belyi, L.L. Vasilyeva, A.S. Ginovker, et al., Silicon Nitride in Electronics, Elsevier, Amsterdam, 1988.
3. Tensimetric investigation of silicon nitride films
4. V.A. Gritsenko, Structure, Electron Structure of Amorphous Insulators on Silicon MIS Structures, Nauka, Novosibirsk, 1993.
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