Comparative study of thin film physical properties for TiN x deposited by DC magnetron sputtering under temperatures less than 100°C on monocrystalline silicon and polycrystalline iron substrates-Reference-Cited by-同舟云学术

Comparative study of thin film physical properties for TiN x deposited by DC magnetron sputtering under temperatures less than 100°C on monocrystalline silicon and polycrystalline iron substrates

Published:1999-11 Issue: Volume:355-356 Page:357-362
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Roquiny Ph.,Poulet A.,Leys Y.,Descamps J.-C.,Bodart F.,VandenBrande P.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference33 articles.

1. Commission of the European Communities, Proposal for a council directive establishing the framework for Community action in the field of water policy, in: Official Journal of the European Communities C series 184/97, Strasbourg, 1997, p. 20.

2. M. Maidhof, D. Hofmann, S. Hunkel, H. Schluessler, in: 39th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Albuquerque, 1996, p. 109.

3. Properties of thin TiN films deposited onto stainless steel by an in-line dry coating process

4. Surface modification of stainless steel in plasma environments

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