Investigation of LiNbO3 thin films grown on Si substrate using magnetron sputter
Author:
Funder
National Science Council
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference12 articles.
1. Reflective waveguide array demultiplexer in LiNbO/sub 3/
2. Complementary Optical Bistable Operation with Integration of Two Directional Couplers onLiNbO3Crystal
3. High-speed and low-driving-Voltage thin-sheet X-cut LiNbO/sub 3/ Modulator with laminated low-dielectric-constant adhesive
4. Electrical Properties of LiNbO3Thin Films by RF Magnetron Sputtering and Bias Sputtering
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