Author:
Privitera V.,La Magna A.,Fortunato G.,Camalleri M.,Magrì A.,Simon F.,Svensson B.G.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference19 articles.
1. I.B. Khaibullin, V.V. Titov, E.I. Shtyrkov, M.M. Zaripov, V.P. Stashko, K.P. Kuzmin, in: J. Gyulai, T. Lohner, E. Pastor (Eds.), Proc. Int. Conf. Ion Implantation, Budapest, pp. 212, 1973.
2. Redistribution and electrical activation of ultralow energy implanted boron in silicon following laser annealing
3. Energy deposition and heat flow for pulsed laser, electron and ion beam irradiation;Rimini,1983
4. Two-dimensional delineation of ultrashallow junctions obtained by ion implantation and excimer laser annealing
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献