Packaging barrier films deposited on PET by PECVD using a new high density plasma source-Reference-Cited by-同舟云学术

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Packaging barrier films deposited on PET by PECVD using a new high density plasma source

Published:2005-06 Issue:3 Volume:119 Page:268-273
ISSN:0921-5107
Container-title:Materials Science and Engineering: B
language:en
Short-container-title:Materials Science and Engineering: B

Author:

Madocks John,Rewhinkle Jennifer,Barton Loren

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference7 articles.

1. Oxygen diffusion barrier properties of transparent oxide coatings on polymeric substrates

2. Novel transparent gas barrier film prepared by PECVD method;Komada,2000

3. High rate PECVD source for flexible subsrates;Madocks,2003

4. Transparent barrier coatings on PET by single- and dual-frequency PECVD;da Silva Sobrinho,1998

5. Thin film processes;Vossen,1978

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