Amorphization of niobium layers by phosphorus ion implantation
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Published:1983-05
Issue:
Volume:209-210
Page:969-974
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ISSN:0167-5087
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Container-title:Nuclear Instruments and Methods in Physics Research
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language:en
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Short-container-title:Nuclear Instruments and Methods in Physics Research
Subject
General Engineering
Cited by
31 articles.
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