MIM, FEM and experimental investigations of the thermal drift in an ultra-high precision set-up for dimensional metrology at the nanometre accuracy level-Reference-Cited by-同舟云学术

MIM, FEM and experimental investigations of the thermal drift in an ultra-high precision set-up for dimensional metrology at the nanometre accuracy level

Published:2016-02 Issue: Volume:94 Page:491-504
ISSN:1359-4311
Container-title:Applied Thermal Engineering
language:en
Short-container-title:Applied Thermal Engineering

Author:

Bouderbala Kamélia,Nouira Hichem,Videcoq Etienne,Girault Manuel,Petit Daniel

Funder

EURAMET

European Union

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Energy Engineering and Power Technology

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