Low pressure drop, CMOS compatible liquid flow sensor with sub ml/h resolution-Reference-Cited by-同舟云学术

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Low pressure drop, CMOS compatible liquid flow sensor with sub ml/h resolution

Published:2009-09 Issue:1 Volume:1 Page:96-99
ISSN:1876-6196
Container-title:Procedia Chemistry
language:en
Short-container-title:Procedia Chemistry

Author:

Piotto Massimo,Dei Michele,Bruschi Paolo

Publisher

Elsevier BV

Subject

General Medicine

Reference6 articles.

1. Thermal flow sensor for liquids and gases based on combinations of two principles;Ashauer;Sensors and Actuators A,1999

2. A differential pressure liquid flow sensor for flow regulation and dosing systems;Boillat,1995

3. Micro-liquid flow sensor;Lammerink;Sensors and Actuators A,1993

4. See for example: www.hsg-imit.de, www.sensirion.com, www.seyonic.com.

5. A compact package for integrated silicon thermal gas flow meters;Bruschi;Microsystem Technologies,2008

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1. Electrochemical miniaturized devices;Micro- and Nanotechnology Enabled Applications for Portable Miniaturized Analytical Systems;2022

2. A CMOS MEMS Thermal Flow Sensor for Gas and Liquid With Parylene-C Coating;IEEE Transactions on Electron Devices;2021-02

3. Integrated Fiber Flow Sensors for Microfluidic Interconnects;Advanced Materials Technologies;2018-09-17

4. Fabrication process for inexpensive, biocompatible and transparent PCBs. Application to a flow meter;Microelectronic Engineering;2017-04

5. An Integrated Thermal Flow Sensor for Liquids Based on a Novel Technique for Electrical Insulation;Lecture Notes in Electrical Engineering;2015

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