Author:
Hays D.C,Cho H,Jung K.B,Hahn Y.B,Abernathy C.R,Pearton S.J,Ren F,Hobson W.S
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference26 articles.
1. F. Ali (Ed.), HEMT's and HBT's, Artech House, Dedham, MA, 1991.
2. S.J. Pearton, C.R. Abernathy, F. Ren, Topics in Compound Semiconductors, World Scientific, Singapore, 1996.
3. A comparative study of wet and dry selective etching processes for GaAs/AIGaAs/lnGaAs pseudomorphic MODFETs
4. Selective Dry Etching of AlGaAs-GaAs Heterojunction
5. Reactive ion etch process with highly controllable GaAs‐to‐AlGaAs selectivity using SF6and SiCl4
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