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Modeling of a pressure sensor based on an array of wedge emitters

  • Published:1999-05 Issue:1-4 Volume:146 Page:239-244
  • ISSN:0169-4332
  • Container-title:Applied Surface Science
  • language:en
  • Short-container-title:Applied Surface Science

Author:

Marqués M.I,Serena P.A,Nicolaescu D,Itoh J

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference30 articles.

1. Proc. Internat. Vac. Microelec. Conf., selected articles published in J. Vac. Sci. Technol. B 11 (2) (1993).

2. Proc. Internat. Vac. Microelec. Conf., selected articles published in J. Vac. Sci. Technol. B 12 (2) (1994).

3. Proc. Internat. Vac. Microelec. Conf., selected articles published in J. Vac. Sci. Technol. B 13 (2) (1995).

4. Proc. Internat. Vac. Microelec. Conf., selected articles published in J. Vac. Sci. Technol. B 14 (3) (1996).

5. Proc. Internat. Vac. Microelec. Conf., selected articles published in J. Vac. Sci. Technol. B 15 (2) (1997).

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