Characterization of amorphous carbon rich Si1−xCx thin films obtained using high energy hydrocarbon ion beams on Si-Reference-Cited by-同舟云学术

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Characterization of amorphous carbon rich Si1−xCx thin films obtained using high energy hydrocarbon ion beams on Si

Published:1999-03 Issue:1-2 Volume:141 Page:141-147
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Huck H,Halac E.B,Oviedo C,Zampieri G,Pregliasco R.G,Alonso E.V,Reinoso M.E,de Benyacar M.A.R

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference15 articles.

1. Characterization of hard amorphous carbon films deposited with high-energy ion beams

2. Structure and thermal behavior of N containing a-C films obtained by high energy ion beam deposition

3. Strain-stabilized highly concentrated pseudomorphicSi1−xCxlayers in Si

4. Enhanced Solubility of Impurities and Enhanced Diffusion near Crystal Surfaces

5. Energetics and Equilibrium Properties of Thin Pseudomorphic Si1-xCx(100) Layers in Si

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1. Microstructure and surface roughness of graphite-like carbon films deposited on silicon substrate by molecular dynamic simulation;Surface and Interface Analysis;2012-03-08

2. Analysis of mechanism of carbon removal from GaAs(100) surface by atomic hydrogen;Applied Surface Science;2008-10

3. Comparative studies on influence of acetylene to argon flow rate ratios on nano-scratch behavior of a-C:H films produced on steel substrates by plasma immersion ion implantation and deposition;Thin Solid Films;2007-12

4. Structure and topographies of diamond-like carbon films produced on tungsten pre-implanted stainless steel substrate by plasma immersion ion implantation and deposition;Diamond and Related Materials;2007-08

5. Influence of acetylene to argon flow rate ratios on structure and properties of hydrogenated amorphous carbon films produced on steel substrates by plasma immersion ion implantation and deposition;Journal of Materials Research;2007-04

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