Deposition of tantalum oxide films by ArF excimer laser ablation-Reference-Cited by-同舟云学术

Deposition of tantalum oxide films by ArF excimer laser ablation

Published:1998-10 Issue:1-2 Volume:136 Page:22-28
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Nishimura Yukio,Shinkawa Akihiro,Ujita Hiroki,Tsuji Masaharu,Nakamura Masafumi

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference20 articles.

1. Photo-CVD of Tantalum Oxide Film from Pentamethoxy Tantalum for VLSI Dynamic Memories

2. Deposition of tantalum oxide films by ArF excimer laser chemical vapour deposition

3. Y. Hisamune, Y. Hokari, K. Kobayashi, Extended Abstracts, The 34th Spring Meeting, Vol. 528, Japan Society for Applied Physics and Related Societies, Tokyo, Japan, 1987.

4. Y. Imai, A. Watanabe, K. Osato, T. Kameyama, K. Kuroda, Chem. Lett. (1990) 170.

5. Photo-Process of Tantalum Oxide Films and Their Characteristics

Cited by 17 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Surface morphology and X-ray photoelectron spectroscopy of BiFeO3 thin films deposited on top of Ta2O5/Si layers;E3S Web of Conferences;2021

2. Oxide composition studies of electrochemically grown tantalum oxide on sintered tantalum using XPS depth-profiling and co-relation with leakage properties;Journal of Materials Science: Materials in Electronics;2017-09-09

3. Nonvolatile Resistance Switching on Two-Dimensional Electron Gas;ACS Applied Materials & Interfaces;2014-10-03

4. Structural, optical, and morphological properties of laser ablated ZnO doped Ta2O5 films;Materials Science and Engineering: B;2010-10

5. Low-temperature phase transformation and phonon confinement in one-dimensional Ta2O5nanorods;Journal of Applied Crystallography;2010-03-26