Author:
Makabe Toshiaki,Maeshige Kazunobu
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference103 articles.
1. Semiconductor Industry Association, Int. Technology Roadmap for Semiconductors’99, San Jose, 1999. http://public.itrs.net
2. P.P. Burggraaf, Solid State Technol. (2000) 31.
3. P.P. Burggraaf, Solid State Technol. (2000) 63.
4. Characteristics of Very High-Aspect-Ratio Contact Hole Etching
5. Vertical Profile Control in Ultrahigh-Aspect-Ratio Contact Hole Etching with 0.05-µm-Diameter Range
Cited by
20 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献