Mass-spectrometric sampling of the ionic and neutral species present in different regions of an RF discharge in methane
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Published:1975-10
Issue:2
Volume:18
Page:179-192
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ISSN:0020-7381
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Container-title:International Journal of Mass Spectrometry and Ion Physics
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language:en
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Short-container-title:International Journal of Mass Spectrometry and Ion Physics
Author:
Vasile M.J.,Smolinsky G.
Cited by
53 articles.
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