Design and Analysis of a Decoupled XY MEMS Microgripper with Integrated Dual-Axis Actuation and Force Sensing * *This work was supported in part by the Macao Science and Technology Development Fund under Grant 090/2015/A3 and 024/2014/A1

Author:

Yang Sijie,Xu Qingsong

Publisher

Elsevier BV

Subject

Control and Systems Engineering

Reference14 articles.

1. Electrostatically driven microgripper;BE;Microelectronic Engineering,2002

2. fabrication, and testing of an MEMS microgripper with dual-axis force sensor;Design;IEEE Sensors Journal,2015

3. Keekyoung. K, Xinyu. L, Yong. Z, Ji. C, Xiaoyu. W and Yu. S. Mechanical characterization of polymeric microcap-sules using a force-feedback MEMS microgripper. Proc. of 2008 30th Annual Int. Conf. of IEEE Engineering in Medicine and Biology Society, pp. 1845–1848, 2008.

4. Chen. T, Chen. L, Sun. L, Wang. J and Li. X. A sidewall piezoresistive force sensor used in a MEMS gripper. Proc. of Int. Conf. on Intelligent Robotics and Applications, pp. 207–216, 2008.

5. Design, simulation and testing of electrostatic SOI MUMPs based microgripper integrated with capacitive contact sensor;Bazaz;Sens. Actuators A, Phys,2011

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