1. Position Control in Lithographic Equipment [Applications of Control];Butler;IEEE Control Systems Magazine,2011
2. Dual-Stage servo systems and vibration compensation in computer hard disc drives;Horowitz;Control Engineering Practice,2007
3. Escareno, J. A., Abadie, J., Rakotondrabe, M. Robust micro-positioning control of a 2DOF piezocantilever based on an extended-state LKF
4. Dual-stage vertical feedback for highspeed scanning probe microscopy;Fleming;IEEE Transactions on Control Systems Technology,2011
5. Fleming, A.J., and Leang, K.K. Design, Modeling and Control of Nanopositioning Systems. Springer International Publishing 978–3-319–06616-5, 2014.