Machine learning-based analysis of the physio-chemical properties for the predictive thickness control of atomic layer deposition
Author:
Publisher
Elsevier BV
Subject
Control and Systems Engineering
Reference9 articles.
1. On the use of Principal Component Analysis for reducing the number of environmental objectives in multi-objective optimization: Application to the design of chemical supply chains;Pozo;Chemcial Engineering Science,2012
2. Atomic Layer Modulation of Multicomponent Thin Films through Combination of Experimental and Theoretical Approaches;Nguyen;Chemistry of Materials,2021
3. A methodology for the kinetic Monte Carlo simulation of alumina atomic layer deposition onto silicon;Mazaleyrat;Computational Material Science,2005
4. Principal component analysis;Abdi;WIREs computational statistics,2010
5. Effects of Al Precursors on Deposition Selectivity of Atomic Layer Deposition of Al2O3 Using Ethanethiol Inhibitor;Kim;Chemistry of Materials,2020
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