On Optimising Spatial Sampling Plans for Wafer Profile Reconstruction ⁎ ⁎The second author gratefully acknowledges the financial support provided by Irish Manufacturing Research (IMR) for this research.-Reference-Cited by-同舟云学术

On Optimising Spatial Sampling Plans for Wafer Profile Reconstruction ⁎ ⁎The second author gratefully acknowledges the financial support provided by Irish Manufacturing Research (IMR) for this research.

Published:2018 Issue:10 Volume:51 Page:115-120
ISSN:2405-8963
Container-title:IFAC-PapersOnLine
language:en
Short-container-title:IFAC-PapersOnLine

Author:

McLoone Seán,Zocco Federico,Maggipinto Marco,Susto Gian Antonio

Publisher

Elsevier BV

Subject

Control and Systems Engineering

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